MULTI–PARAMETRIC H∞ CONTROL OF A MICRO ACTUATOR
نویسندگان
چکیده
منابع مشابه
Multi–parametric H∞ Control of a Micro–actuator
In this article the control problem of a micro-actuator (μ − A) is considered. The μ − A is composed of a micro-capacitor, whose one plate is clamped while its other flexible plate’s motion is constrained by hinges acting as a combination of springs and dashpots. The distance of the plates is varied by the applied voltage between them. The flexibility of the moving plate coupled to the dynamics...
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ژورنال
عنوان ژورنال: IFAC Proceedings Volumes
سال: 2005
ISSN: 1474-6670
DOI: 10.3182/20050703-6-cz-1902.00561